MOEMS

Prof. John Bowers

Optoelectronics Res. Group

Prof. Daniel Blumenthal

OCPN

Prof. Evelyn Hu

BioMEMS

Prof. Cyrus Safinya

Prof. Carl Meinhart

Prof. Linda Petzold

Prof. Tom Soh

Soh Laboratory

AlN Resonators

Prof. David Clarke

Prof. Kimberly Turner

MEMS Dynamics Lab

Prof. Robert McMeeking

Nano- Characterization

Prof. David Clarke

Prof. Glenn Beltz

Prof. Tom Soh

Prof. A. G. Evans

Prof. Robert Odette